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Inventory # AA-3984
This TEL Tokyo Electron EPC-T0091A-11 is used working surplus
Part No: 4S013-510
The board has a missing connector pin (see photos)
RKC Part No: REX-F400
TEL Tokyo Electron 2985-449464-W3 SHU Wafer Shuttle Slider Assembly ACT12 200mm Inventory # AA-3984TEL Tokyo Electron 2985 449464 W3 SHU Wafer Shuttle Slider Assembly ACT12 200mm Spare Inventory # A 6546 Part No: 2985 449464 W3 Model No: SLIDER ASSY (ACT12), SHU Removed from a TEL Tokyo Electron Clean Track ACT12 200 200mm System Part List Assembly Part No: 2985 449464 W3 SLIDER ASSY (ACT12), SHU 2910 312495 12 SIDE PLATE x1 2910 329693 11 BAR x1 2910 329695 11 COVER,REAR x1 2910 319866 11 BASE(SHU) x1 2910 319867 11 COVER,FRONT x1 2910 312493 12
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